Scanning tunneling microscopy (STM) and reflection-high-energy electron diffraction (RHEED) were used to observe changes in facet structures induced by depositing Au atoms on vicinal Si surfaces misoriented from (111) toward [11-2] and [-1-12] directions. The facets structures were found to be quite different from each other for the two misorientations. Several kinds of one-dimensional stripes were observed on different facets, and the Au coverage for each facet structure was determined. The surface was almost uniformly covered by (775) facets for [11-2] vicinal by 0.25 monolayer coverage of Au, while by (557) facets for [-1-12] one at 0.2 ML. High-resolution STM images are also presented and discussed in relation to the previously proposed models of atomic structures. [DOI: 10.1380/ejssnt.2003.84]