A fabrication method of four-probe fine electrodes on a Si(100)-2×1-H surface was developed. The method involves conventional lithographic and scanning-probe nano-fabrication techniques followed by a high-temperature cleaning process of the surface. Using scanning tunneling microscopy, it was confirmed that a Si(100)-2×1-H surface was formed except for the fine electrode areas. Tunneling spectroscopy showed that the metallic feature remains on the electrode after the high-temperature cleaning process. To examine function of the electrodes, electrical transport measurements of a nanoscale silver wire were performed. The result exhibited significant conductance of the wire. From these results, it was concluded that the fabricated fine electrodes have the ability to measure electrical conduction of nanostructures fabricated on surfaces. [DOI: 10.1380/ejssnt.2004.160]