Surface Phases and Processes on Si Surface

Victor G. Lifshits; Yury L. Gavrilyuk; Dmitry A. Tsukanov; Boris K. Churusov; Namjil Enebish; Svetlana V. Kuznetsova; Serguei V. Ryjkov; Dmitriy Gruznev; Chiei Tatsuyama

doi:10.1380/ejssnt.2004.56

Reviews

Surface Phases and Processes on Si Surface

Victor G. Lifshits, Yury L. Gavrilyuk, Dmitry A. Tsukanov, Boris K. Churusov, Namjil Enebish, Svetlana V. Kuznetsova, Serguei V. Ryjkov, Dmitriy Gruznev, Chiei Tatsuyama

Author information

Victor G. Lifshits
Institute of Automation and Control processes, Russia
Faculty of Physics and Engineering, Far Eastern State University, Russia
Department of Electronics, Vladivostok State University of Economics and Service, Russia
Yury L. Gavrilyuk
Institute of Automation and Control processes, Russia
Dmitry A. Tsukanov
Institute of Automation and Control processes, Russia
Boris K. Churusov
Institute of Automation and Control processes, Russia
Namjil Enebish
University of Technology of the Mongolian Academy of Sciences, Mongolia
Svetlana V. Kuznetsova
Faculty of Physics and Engineering, Far Eastern State University, Russia
Serguei V. Ryjkov
Institute of Automation and Control processes, Russia
Faculty of Physics and Engineering, Far Eastern State University, Russia
Dmitriy Gruznev
Institute of Automation and Control processes, Russia
Faculty of Engeniering, Toyama University, Japan
Chiei Tatsuyama
Faculty of Engeniering, Toyama University, Japan

Keywords: Scanning tunneling microscopy, LEED, Auger electron spectroscopy, Surface thermodynamics (including phase transition), Surface diffusion, Surface electrical transport

JOURNAL FREE ACCESS

2004 Volume 2 Pages 56-76

DOI https://doi.org/10.1380/ejssnt.2004.56

Details

Abstract

The general observations concerning the commonly accepted terms related to Si surface like 'surface', 'surface phase', 'adatoms', 'in phase' and 'on phase' atoms are given. Surface phases preparation, composition and their role in surface processes is examined. The influence of surface phases on processing as diffusion, desorption, codeposition, interface formation and surface conductivity is described. [DOI: 10.1380/ejssnt.2004.56]

Corresponding author

Register with J-STAGE for free!