Conference -ISSS-4-
Low-energy Ion Induced X-ray Emission from Insulators and Development of an Instrument for its Measurement
2006 Volume 4 Pages 144-148
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2006 Volume 4 Pages 144-148
Low energy ion induced X-ray emission (LIIXE) from insulators is presented and discussed. Ions of light, such as He+ ions, or heavy, such as Ga+ ions, in energy from lower than 1 keV/AMU (atomic mass unit) to several keV are demonstrated to induce characteristic X-ray emission effectively from insulator samples. Features of LIIXE, such as using very low energy ions, no needs for conducting coating on surface of samples, and relatively high X-ray yields for low energy characteristic X-rays, make it prospective for being applied in materials analysis, especially for insulator materials containing light elements. A proto-type instrument under developing for measurement of the X-ray is introduced. [DOI: 10.1380/ejssnt.2006.144]
