X-ray Emission Measurement from Organic and Insulating Materials with Low Energy Ga Ion Beams

R. C. Che; M. Song; J. C. Rao; M. Takeguchi; K. Furuya

doi:10.1380/ejssnt.2006.365

Conference -ALC05-

X-ray Emission Measurement from Organic and Insulating Materials with Low Energy Ga Ion Beams

R. C. Che, M. Song, J. C. Rao, M. Takeguchi, K. Furuya

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Keywords: low energy ion beam, X-ray emission, organic and insulating materials, the normalized X-ray yield

JOURNAL FREE ACCESS

2006 Volume 4 Pages 365-368

DOI https://doi.org/10.1380/ejssnt.2006.365

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Abstract

We observed a phenomenon of X-ray emission from various types of organic and insulating materials under irradiation of a low energy (30 kV) gallium ion beam. Energy dispersive X-ray spectrometer combined with a focused ion beam instrument could detect light elements with low K-shell electron excitation energy such as carbon, oxygen, fluorine, sodium and silicon. Effect of the current intensity of gallium ion beam on the normalized X-ray yield was investigated. It was found that a strong irradiation beam current could effectively enhance the normalized X-ray yield. [DOI: 10.1380/ejssnt.2006.365]

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