e-Journal of Surface Science and Nanotechnology
Online ISSN : 1348-0391
ISSN-L : 1348-0391
Conference -ISSS-4-
Variation of Contrast of H/pn-Si(100) Imaged with Different Emission Electron Microscopies
Hirokazu FukidomeMasamichi YoshimuraKazuyuki UedaFang Zhun GuoToyohiko KinoshitaKeisuke Kobayashi
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2006 Volume 4 Pages 539-543

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Abstract

H-terminated Si(100) with lateral p+-n junction has been imaged with emission electron microscopies as a model system where surface electric field is inhomogeneously distributed. It is clarified that mirror electron microscope has a higher sensitivity to the electric field parallel to the surface, compared to photoemission electron microscopy (PEEM) with either Hg-lamp (UV-PEEM) or synchrotron radiation to emit secondary electrons (SE-PEEM). On the other hand, intensity contrast between p-region and n-region arising from the difference in band bending, i.e., an electric field normal to surface, can be detected by UV-PEEM. It has been found in SE-PEEM that the intensity contrast becomes lost with higher kinetic energies. [DOI: 10.1380/ejssnt.2006.539]

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この記事はクリエイティブ・コモンズ [表示 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by/4.0/deed.ja
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