e-Journal of Surface Science and Nanotechnology
Online ISSN : 1348-0391
ISSN-L : 1348-0391
Regular Papers
Selective dewetting of polymers on metal/silicon micro-patterns
Olaf KarthausTakuto TerayamaYuichi Hashimoto
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2006 Volume 4 Pages 656-660

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Abstract

Modification of electrode surfaces plays an important role for electronics. Most often, lithography techniques are used, but they suffer from high fabrication cost, material restrictions and size limitations. Here we investigate if dewetting can be used to selectively coat a micron-sized gold stripe electrode on a silicon substrate. [DOI: 10.1380/ejssnt.2006.656]

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この記事はクリエイティブ・コモンズ [表示 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by/4.0/deed.ja
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