Fluctuations of Electron Beams Emitted from Single-Atom Electron Sources Prepared with Different Techniques

Tsuyoshi Ishikawa; Keisuke Tagawa; Tomohiro Urata; Chuhei Oshima; Boklae Cho; Eiji Rokuta

doi:10.1380/ejssnt.2008.11

Regular Papers

Fluctuations of Electron Beams Emitted from Single-Atom Electron Sources Prepared with Different Techniques

Tsuyoshi Ishikawa, Keisuke Tagawa, Tomohiro Urata, Chuhei Oshima, Boklae Cho, Eiji Rokuta

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Keywords: Scanning Electron Microscopy (SEM), Electron emission, Field emission microscopy, Single-atom electron source, Extreme High Vacuum (XHV)

JOURNAL FREE ACCESS

2008 Volume 6 Pages 11-14

DOI https://doi.org/10.1380/ejssnt.2008.11

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Abstract

We compared fluctuations of electron beams emitted from single-atom electron sources, on which the surface Pd metals were deposited by two different techniques, vacuum deposition and electroplating deposition. The similar nano-pyramids were fabricated successfully by both the techniques, but the stabilities of the beam currents were different each other; the electron source prepared by vacuum deposition was far superior to those of electroplating deposition. The possible origin was discussed on the basis of AES analysis. [DOI: 10.1380/ejssnt.2008.11]

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