Structural Analysis of Crystal Surfaces by Reflection High-Energy Electron Diffraction Patterns: The Si(111)7×7 Surface

Tomoko Minami; Yuki Yamagata; Hitoshi Nakahara; Ayahiko Ichimiya

doi:10.1380/ejssnt.2008.87

Conference -ALC07-

Structural Analysis of Crystal Surfaces by Reflection High-Energy Electron Diffraction Patterns: The Si(111)7×7 Surface

Tomoko Minami, Yuki Yamagata, Hitoshi Nakahara, Ayahiko Ichimiya

Author information

Keywords: Reflection high-energy electron diffraction (RHEED), Surface structure, morphology, roughness, and topography, Silicon, Single crystal surfaces

JOURNAL FREE ACCESS

2008 Volume 6 Pages 87-90

DOI https://doi.org/10.1380/ejssnt.2008.87

Details

Abstract

Energy filtered reflection high-energy electron diffraction (RHEED) patterns are analyzed for the Si(111)7×7 surface using full dynamical calculation. Calculated RHEED patterns of the Si (111)7×7 are not in agreement with measured ones for various surface atomic positions. Especially the calculated intensity ratio of the (1/7 1/7) and the (2/7 2/7) rods is very small in comparison with measured one. The discrepancy between measured and calculated RHEED patterns is not recovered for the filtered RHEED patterns using the theoretical real and imaginary potentials. It is found that the RHEED intensity ratio of the (1/7 1/7) and the (2/7 2/7) rods depends strongly upon adatom potentials. [DOI: 10.1380/ejssnt.2008.87]

Corresponding author

Register with J-STAGE for free!