e-Journal of Surface Science and Nanotechnology
Online ISSN : 1348-0391
ISSN-L : 1348-0391
Conference -ICSFS-14-
Fabrication of a Patterned Interference Filter Array Deposited by an Atmospheric Pressure Vapour Deposition Technique
J. R. FysonZs. NagyC. L. Bower
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JOURNAL FREE ACCESS

2009 Volume 7 Pages 284-289

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Abstract

A method is demonstrated of making interference filters fabricated using a layer of metal oxide deposited by a new atmospheric pressure atomic layer deposition (ALD) technique. By depositing different thicknesses of metal oxides between reflecting layers, filters with various spectral characteristics can be made. A method of patterning the ALD layers has been devised using ink-jet and this allows the fabrication of a colour filter arrays of any design. [DOI: 10.1380/ejssnt.2009.284]

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この記事はクリエイティブ・コモンズ [表示 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by/4.0/deed.ja
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