Calculation of Desorption Parameters for Mg/Si(111) System

S. A. Dotsenko; N. G. Galkin; K. N. Galkin

doi:10.1380/ejssnt.2009.816

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Calculation of Desorption Parameters for Mg/Si(111) System

S. A. Dotsenko, N. G. Galkin, K. N. Galkin

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Keywords: Metallic films, Thermal desorption, Alkaline earth metals, Silicon, Reflection spectroscopy, Magnesium, Desorption parameters, Si(111)

JOURNAL FREE ACCESS

2009 Volume 7 Pages 816-820

DOI https://doi.org/10.1380/ejssnt.2009.816

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Abstract

The method for calculation of desorption parameters developed for differential reflection spectroscopy is presented. It enables to study desorption and to control phase composition of film simultaneously. Spectra of differential reflectance Δ R/R of the film are initial data for the method. The method was used for Mg/Si(111) system. The desorption parameters for bulk Mg film were calculated and limitations of the method were found. [DOI: 10.1380/ejssnt.2009.816]

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