Self-assembly technique for MEMS vertical comb electrostatic actuator

K. Isamoto; T. Makino; A. Moroswa; C. Chong; H. Fujita; H. Toshiyoshi

doi:10.1587/elex.2.311

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Self-assembly technique for MEMS vertical comb electrostatic actuator

K. Isamoto, T. Makino, A. Moroswa, C. Chong, H. Fujita, H. Toshiyoshi

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Keywords: vertical comb, process stiction, self-assembly, self alignment

JOURNAL FREE ACCESS

2005 Volume 2 Issue 9 Pages 311-315

DOI https://doi.org/10.1587/elex.2.311

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Abstract

We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC has shown good electrostatic scanning performance of over 1.0-degree static-rotation angle with a typical drive voltage of 20V without any in-use electromechanical failure.

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