Fabrication technique of a 3 dimensional SU8 mold on PMMA substrate

I. H. Hamzah; Asrulnizam Abd Manaf; O. Sidek

doi:10.1587/elex.6.1726

LETTER

Fabrication technique of a 3 dimensional SU8 mold on PMMA substrate

I. H. Hamzah, Asrulnizam Abd Manaf, O. Sidek

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Keywords: PGMEA, PMMA, SU8-10, grayscale, resolution

JOURNAL FREE ACCESS

2009 Volume 6 Issue 24 Pages 1726-1731

DOI https://doi.org/10.1587/elex.6.1726

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Abstract

Silicon or glass was a common material for SU8 coating. However, these materials are hard and brittle, make it difficult for drilling and dicing. This paper reported the effect of grayscale and resolution based on the various length of time for Propylene Glycol Methyl Ether Acetate (PGMEA) developing towards SU8-10 coated on polymethylmethacrylate (PMMA). The grayscale results show that the 0% (solid black) produced the highest percentage on the square structure formed to the SU8-10 film coated on PMMA and the highest resolution had been produced for the 30 minutes of PGMEA developing.

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