Electro-thermal tuning of MEMS VCSEL with giant wavelength-temperature dependence

Masanori Nakahama; Hayato Sano; Norihiko Nakata; Akihiro Matsutani; Fumio Koyama

doi:10.1587/elex.9.416

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Electro-thermal tuning of MEMS VCSEL with giant wavelength-temperature dependence

Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama

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Keywords: vertical cavity surface emitting laser (VCSEL), tunable laser, micro-machine, thermal stress, cantilever

JOURNAL FREE ACCESS

2012 Volume 9 Issue 5 Pages 416-421

DOI https://doi.org/10.1587/elex.9.416

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Abstract

We demonstrate the electro-thermal tuning of a MEMS VCSEL with a thermally actuated SiO₂/semiconductor cantilever. The wavelength-temperature dependence of the MEMS VCSEL could be increased as large as 0.46nm/K, which is 6 times larger than that of conventional single-mode lasers. A micro-heater is integrated nearby the cantilever structure. A continuous wavelength tuning range of 4.7nm is obtained with heating power of 29mW.

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