In this study, micro-hardness tests and AFM observations were performed on SUS316L low-carbon austenitic stainless steel pre-strained by cold rolling to investigate its deformation behavior. The following results were obtained. Despite the fact that the same plastic strain was applied, post-tensile test AFM showed narrower slip-band spacing in a reduction in area of 30% cold-rolled specimen than the unrolled specimen. Concentrated slip bands were observed near grain boundaries. These were presumably due to slip blocking at grain boundaries. SCC sensitivity increased at a hardness of 300 or higher, the frequency occurrence of a hardness of 300 or higher in the micro-hardness measurements was compared. The micro-hardness did not exceed 300both within grains and at grain boundaries in the unrolled and up to a reduction in area of 20% cold-rolled specimens of before and after the tensile tests. Micro-hardness exceeding 300 was found to occur frequently in after tensile test specimens with a reduction in area of 30% or more, particularly at grain boundaries. It is suggested that the nonuniformity of deformation at grain boundaries plays an important role of IGSCC crack propagation mechanism of low-carbon austenitic stainless steel.