Journal of the Ceramic Society of Japan
Online ISSN : 1348-6535
Print ISSN : 1882-0743
ISSN-L : 1348-6535
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Effects of adding Y2O3 on the electrical resistivity of aluminum nitride ceramics
Hiroaki SAKAIYuji KATSUDAMasaaki MASUDAChikashi IHARATetsuya KAMEYAMA
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2008 Volume 116 Issue 1352 Pages 566-571

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Abstract

Electrical resistivity of AlN ceramics was examined with various amounts of Y2O3 within 0 to 4.8 mass%. The electrical resistivity at room temperature varied from 1016 to 1010 Ω·cm with different Y2O3 amounts and at sintering temperatures. In the typical samples sintered at 1900°C, a smaller amount of Y2O3 addition with 0.1 to 0.5 mass% gives the lowest electrical resistivity of 1010 Ω·cm, whereas the higher amount of Y2O3 maintains high resistivity of more than 1013 Ω·cm. The results derived from different analytical techniques such as impedance analysis, cathodoluminescence spectrum and microstructural analysis explain the importance of the oxygen concentration in the AlN grain for the electrical resistivity of AlN ceramics.

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© 2008 The Ceramic Society of Japan
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