2010 Volume 118 Issue 1384 Pages 1140-1143
Fine-structured ZnO patterns with sub-micrometer based on a replication method was fabricated. A replication method was used mixtures of polyvinyl alcohol (PVA) and ZnO nanosized particles in water. The mixtures were then filled in a quartz mold with different pattern sizes and dried at room temperature. After the drying, the PVA and ZnO dried film was detached from the mold. Through burn-out at various sintering temperatures, ZnO patterns with line and space patterns as smalls as sub-micrometer in size were successfully fabricated. The results demonstrated possibilities to produce inorganic materials with various compositions and structures with a facile approach and a simple method.