Orientation control of (001) and (101) in epitaxial tetragonal Pb(Zr,Ti)O3 films with (100)/(001) and (110)/(101) mixture orientations

Satoru UTSUGI; Takashi FUJISAWA; Yoshitaka EHARA; Tomoaki YAMADA; Shintaro YASUI; Mohamed-Tahar CHENTIR; Hitoshi MORIOKA; Takashi IIJIMA; Hiroshi FUNAKUBO

doi:10.2109/jcersj2.118.627

Feature: Evolution of Dielectric Materials: Papers

Orientation control of (001) and (101) in epitaxial tetragonal Pb(Zr,Ti)O₃ films with (100)/(001) and (110)/(101) mixture orientations

Satoru UTSUGI, Takashi FUJISAWA, Yoshitaka EHARA, Tomoaki YAMADA, Shintaro YASUI, Mohamed-Tahar CHENTIR, Hitoshi MORIOKA, Takashi IIJIMA, Hiroshi FUNAKUBO

Author information

Satoru UTSUGI
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
Takashi FUJISAWA
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
Yoshitaka EHARA
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
Tomoaki YAMADA
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
Shintaro YASUI
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
Mohamed-Tahar CHENTIR
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
Hitoshi MORIOKA
Department of Innovative and Engineered Materials, Tokyo Institute of Technology
Application Laboratory, Bruker AXS
Takashi IIJIMA
Research Center for Hydrogen Industrial Use and Storage, National Institute of Advanced Industrial Science and Technology
Hiroshi FUNAKUBO
Department of Innovative and Engineered Materials, Tokyo Institute of Technology

Keywords: Orientation control, Epitaxial Pb(Zr,Ti)O₃, Tetragonal symmetry

JOURNAL FREE ACCESS

2010 Volume 118 Issue 1380 Pages 627-630

DOI https://doi.org/10.2109/jcersj2.118.627

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Abstract

Epitaxial tetragonal PZT films with (100)/(001) and (110)/(101) and (111) orientations were grown on various kinds of single crystal substrates having different thermal expansion coefficient. Volume fractions of (001) and (101) orientations in respective (100)/(001)- and (110)/(101)-oriented films were almost linearly increased with increasing thermal strain of the films that was generated under the cooling process after the deposition from the growth temperature to the Curie temperature. Perfectly (001)- and (101)-oriented films were grown on (111) CaF₂ substrates with large thermal expansion coefficient. Observed saturation polarization values linearly changed with the volume fractions of (100) and (101) orientations.

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