Recently, zirconia films have attracted considerable attention because of their potential applications in solid oxide fuel cells and as thermal barrier coatings and oxygen sensors. Herein, we report that high-density zirconia films can be formed at room temperature by using the aerosol gas deposition (AGD) technique and discuss the conditions required for film formation. The experimental results indicate that the particle size and specific surface area of the zirconia powder used determine the success of film fabrication by AGD. Films are successfully formed when the mean particle size and specific surface area of the powder are in the range 2.1–3.5 µm and 4.4–6.5 m²/g, respectively.