Deposition of carbon films by fasing targets sputtering on substrates at liquid nitrogen temperature and control of the angular distribution of the depositing particles were attempted to improve the protective properties of diamond like carbon films(DLC films). The films deposited at the liquid nitrogen temperature has much higher density and higher hardness than the film deposited at room temperature has. Removal of deposition particles with high incident angles were found to be effective to increase the density and hardness of the film. These facts indicate that a decrease in substrate temperature to liquid nitrogen temperature and the suppression of self shadowing effect by removing the deposition particles with high incidence angles were effective to obtain a DLC film with high density and high hardness.