日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
多層膜・人工格子・グラニューラー
スパッタ法によるNiFe/FeMn反強磁性結合薄膜の多層化の考察
松本 光功森迫 昭光武井 重人田島 滋一
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ジャーナル オープンアクセス

1997 年 21 巻 4_2 号 p. 509-512

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NiFe/FeMn multilayers were prepared for application to thin-film permanent magnets, whose remanent magnetization is considered not to be reduced by any external field. The effects of the film thickness, the combination of NiFe and FeMn layers, and the substrate layer were investigated. In multilayered FeMn/NiFe/FeMn/ ··· films on a Cu sublayer, maximum exchange-coupling fields were obtained with an initial FeMn layer thickness of 15 nm, a remaining FeMn thickness of 20-30 nm, and a NiFe thickness of 20-30nm.

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© 1997 (社)日本応用磁気学会
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