日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
論文
大バルクハウゼン効果を用いた薄膜磁気センサの作製
馬場 康壽星川 潔秋山 賢輔栗原 幸男根岸 靖小山 昌二安部 正規後藤 章博渡邉 騎通阿部 晋
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ジャーナル オープンアクセス

2003 年 27 巻 4 号 p. 406-409

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We fabricated a new magnetic thin film sensor using a large Barkhausen effect. The sensor consists of a Ni-Fe thin film stripe, 0.7 mm by 4.6 mm, on a glass substrate and an aluminum thin film search coil of 400 turns on the other side of the substrate. The Ni-Fe thin film is a bi-layer composed of a soft magnetic layer and a semi-hard magnetic layer. The aluminum thin film search coil size is 6 mm by 10 mm; the line width and space are 5 μm. As a result, the sensor generated an induced pulse of about 1.4 mV by the large Barkhausen jump under asymmetrical ac magnetic fields in the frequency range from 1 to 100 Hz.

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© 2003 (社)日本応用磁気学会
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