表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
論文
InGaAs量子ドットのSPEED法による作製とその光学特性
間野 高明渡邉 克之塚本 史郎今中 康貴高増 正藤岡 洋木戸 義勇尾嶋 正治小口 信行
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2000 年 21 巻 2 号 p. 107-113

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Uniform InGaAs Quantum dots were fabricated by modified droplet epitaxy method termed Separated-Phase Enhanced Epitaxy with Droplets (SPEED). Due to the surface diffusion length difference between In and Ga, highly dense Ga droplets were formed around InGa alloy droplets. During the crystallization process of the droplets, these highly dense Ga droplets effectively prevented the two-dimensional growth of InGaAs. Moreover, phase separation effect was enhanced during the annealing process. As the result, InGaAs quantum dots, whose size was smaller than that of droplets, were formed in the upper part of the sample with a flat surface. These quantum dots provide narrow (21.6 meV) photoluminescence spectra. From the magneto-photoluminescence measurements, the sizes of quantum dots were estimated to be 10 nm and 3.7 nm in lateral and vertical directions, respectively.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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