Surface control by low-temperature deposited buffer layer enables the growth of high-quality GaN on a sapphire substrate the lattice mismatch of which is as large as 14%. With use of such highly mismatched systems, novel electronic devices such as new lighting source which replaces conventional light bulb, super-high-density optical storage systems, high-power and high-speed transistors and UV image sensors for remote sensing and flame detection will be realized. This paper describes the details of the mechanism of this surface control technology.