論文
MgO(100) 表面上にエピタキシャル成長したチタン酸化物表面形態の研究 : 非接触AFMによる研究
2000 年 21 巻 7 号 p. 405-412
詳細
2000 年 21 巻 7 号 p. 405-412
The surface morphology of very thin titanium oxide films grown on MgO(100) was studied by use of non-contact atomic force microscopy (AFM). When Ti was deposited, in an O2 atmosphere of 2.6×10-6 Pa, on MgO(100) maintained at 600oC, rectangular structures of spinel nano-crystals were observed. Solid state reactions simultaneously occur during film deposition. When the surface was heated at 900oC in an O2 atmosphere of 2.6×10-6 Pa, a long range stripe structure was observed. The structure is related to the modulated structure characteristics of the Mg2TiO4(100) surface. A titanium oxide-MgO interfacial reaction proceeded by prolonged annealing. The stripe structure disappeared and atomically flat terraces with a step height of 0.2 nm were observed.
