表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
論文
PbTiO3および (Pb, La)TiO3スパッタ薄膜の配向性への冷却効果
相 龍太和佐 清孝市川 陽子
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2000 年 21 巻 8 号 p. 456-461

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Thin films of PbTiO3 (PT) and (Pb, La)TiO3 (PLT) were grown at 600oC on (100)MgO substrates by rf-magnetron sputtering. The crystal orientation of the PT thin films was investigated with various cooling rates (8oC/min to 33oC/min). It is found that the degree of c-axis orientation of the PT thin films increases with increasing cooling rates and the degree of a-axis orientation increases with decreasing cooling rates. While, c-axis orientation of the PLT thin films is grown independent of the cooling rates. The cooling rates are essential for the control of the orientation of the PT thin films on (100)MgO substrates.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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