表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
特集 : SiC素子実用化のための表面研究
金属/6H-SiC界面で見いだされたショットキーリミットと電荷中性点
原 史朗
著者情報
ジャーナル フリー

2000 年 21 巻 12 号 p. 791-799

詳細
抄録

We report the Schottky limit and a charge neutrality level (CNL) experimentally demonstrated at metal/6H-SiC (0001) interfaces. A passivated SiC surface with an almost flat band was formed by dipping the substrate in boiling pure water before metallization. The total density of interface states was 4.6 × 1010 states · cm-2/eV, indicating that the density of the metal induced gap states (MIGS) was less than this value. In contrast, at incompletely passivated interfaces without the boiling water dipping process, a broad continuum of interface states was observed with the CNL located at 0.797 eV from the conduction band minimum. The origin of these interface states was found to be in the disordered interface layers.

著者関連情報

この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
前の記事 次の記事
feedback
Top