We have studied deposition of hydrogenated Si cluster ions, Si_nH_x⁺ grown in an External Quadrupole Static attraction Ion Trap (EQSIT), on Si surfaces. The Si₆H₁₃⁺ and Si₈H₁₉⁺ ions, which have sp³ bonding networks, were grown stably in the EQSIT and subsequently deposited on the Si(111)-(7×7) surfaces with impact energy E_d = 6 and 12 ± 1 eV. The surface structures with the clusters were observed by Scanning Tunneling Microscopy (STM) and investigated in comparsion with the Si₆H₁₃⁺ and Si₈H₁₉⁺ structures calculated using the density functional theory. The STM observations indicated that the cluster ions adsorbed preferentially on the faulted half of the Si(111)-(7×7) unit cell. We observed that Si₆H₁₃⁺ is more resistant to fragmentation than Si₈H₁₉⁺ on impact to the surfaces. We consider that the difference is due to the structural difference of the clusters; Si₆H₁₃⁺ ions have a tightly connected ring structure while Si₈H₁₉⁺ ions have chain structures with several isomers.