表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
特集:ウエットプロセスの新展開
無電解析出法による傾斜機能磁性薄膜の作製
本間 敬之逢坂 哲彌佐藤 裕崇
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2001 年 22 巻 6 号 p. 350-356

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Attempts made on the gradient control of functional properties for electroless deposited magnetic thin films were overviewed to introduce the methodology for the preparation of functionally graded thin films by means of electrochemical processes. By use of appropriate ultra-thin underlayers, the coercivity, Hc, of electroless CoNiP films was controlled toward the film thickness direction. Sequential control of the rotating speed of substrates during the deposition enabled the programmed control of the gradient of Hc. These procedures could be useful tools for optimizing graded magnetic properties of the films used in various magnetic devices. The tools are expected to be widely applied to fabricate various kinds of films with functionally-graded properties.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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