表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
特集:フォトニック結晶
自己クローニング法によるフォトニック結晶の作製と光学デバイスへの応用
川嶋 貴之大寺 康夫川上 彰二郎
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2001 年 22 巻 11 号 p. 723-728

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We have proposed a method for fabricating photonic crystals, which is named autocloning. It is based on sputtering deposition and sputter etching. When we stack multilayer with the autocloning method on a substrate patterned periodically, we can preserve corrugated surface shape whose symmetry and periodicity reflect those of the substrate pattern. Consequently, we can realize the multi-dimensional structures automatically. Almost all the processes are carried out in a vacuum chamber without alignment process, accordingly the autocloning is simple, reliable, and suitable for mass-production. In this paper, we report the mechanisms of the autocloning and its applications to optical devices. Particularly, we describe the polarization splitters and the channel waveguides utilizing lattice modulation of the photonic crystals.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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