表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
特集:非接触原子間力顕微鏡—なにがどこまで見えるか?—
非接触原子間力顕微鏡で半導体の何がどこまで見えるか?
森田 清三菅原 康弘
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2002 年 23 巻 3 号 p. 132-140

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In this review article, we clarified what we can image on semiconductor surfaces using noncontact atomic force microscopy (NC-AFM): 1. We can image covalent bonding force on Si(111)7×7 surface. 2. We can discriminate Si adatoms from Sb adatoms on Si(111)5√3×5√3-Sb surface with a Si tip and a Sb adsorbed tip. 3. We can image tilted dangling bond on Si(100)2×1 surface. 4. We can image individual hydrogen atom on Si(100)2×1:H monohydride surface. 5. We can measure atomic strain around missing dimer. 6. We can image a potential map on Si(111)√3×√3-Ag surface by measuring NC-AFM image as a function of tip-sample distance. 7. We can selectively control atomic force by placing an adequate atom on the tip apex. 8. We can pull up lower Si atoms constituting buckled Si dimer by increasing attractive force between tip and sample surface.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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