2002 年 23 巻 3 号 p. 132-140
In this review article, we clarified what we can image on semiconductor surfaces using noncontact atomic force microscopy (NC-AFM): 1. We can image covalent bonding force on Si(111)7×7 surface. 2. We can discriminate Si adatoms from Sb adatoms on Si(111)5√3×5√3-Sb surface with a Si tip and a Sb adsorbed tip. 3. We can image tilted dangling bond on Si(100)2×1 surface. 4. We can image individual hydrogen atom on Si(100)2×1:H monohydride surface. 5. We can measure atomic strain around missing dimer. 6. We can image a potential map on Si(111)√3×√3-Ag surface by measuring NC-AFM image as a function of tip-sample distance. 7. We can selectively control atomic force by placing an adequate atom on the tip apex. 8. We can pull up lower Si atoms constituting buckled Si dimer by increasing attractive force between tip and sample surface.