表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
特集:フィールドエミッションの最近の進展
フィールドエミッタに適応する導電性ダイヤモンド状アモルファス炭素膜の作製
木下 治久
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2002 年 23 巻 1 号 p. 51-55

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Electrically conductive diamond-like amorphous carbon (DAC) films with nitrogen (DAC:N) were deposited, and studied with respect to their potential application to field emitters. In the deposition of electrically conductive DAC:N films, a supermagnetron plasma CVD apparatus with multi-function was used. By using the supermagnetron plasma CVD apparatus, hard and thick DAC:N films of very low electrical-resistivity (0.034 Ωcm) were deposited. Cone-shaped Si field emitters were fabricated, and the surfaces were coated with 50 nm-thick DAC:N films. Characteristics of the emitters revealed that large reductions of turn-on voltage were achieved by the coating.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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