表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
研究紹介
時間分解内殻準位光電子分光による半導体表面過程の解析
前田 文彦渡辺 義夫
著者情報
ジャーナル フリー

2002 年 23 巻 12 号 p. 767-774

詳細
抄録

We describe the development of an equipment which can be employed for examining various surface phenomena in real-time by performing time-resolved core-level photoelectron spectroscopy. We demonstrate this unique capability by examining the desorption of Sb atoms occurring from GaSb(001) as well as Sb/GaAs(001) in the temperature range of 440oC∼580oC, which is the usual growth temperature. The time dependence of core-level photoelectron spectra revealed that the activation energy for Sb desorption varies from 0.7 eV to 2.5 eV due to the difference in local bonding structures. In addition, experiments on alternating growth of GaAs suggest that there are two Ga adsorption sites, the occupation of which is dependent on the Ga coverages. This finding is in agreement with theoretical studies. These results demonstrate the potential of the technique to elucidate the surface process by real-time analysis.

著者関連情報

この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
前の記事 次の記事
feedback
Top