VAMAS project was set up at the economic summit at Versailles in 1982. The objective of VAMAS project is to establish the reliability of metrological technologies vital to the development of new materials and processing. The round robins of VAMAS project could clearly indicate the standardization process for surface chemical analysis, and TC 201 was established in ISO in 1991 to make the international standards for surface chemical analysis. At present, the number of P-members of TC 201 is 10 and that of O-members is 20. TC 201 is composed of 8 SC and 1 WG. The objective of SC and WG is to propose the new work items and to establish international standards for their covering surface chemical analysis methods. Until now, 12 international standards have been published. At the same time of the establishment of TC 201, TC 202 was also established in ISO to make the international standards for micro beam analysis. In Japan, we established the domestic committee to support the activities of TC 201 and TC 202.