International standards of XPS and AES spectrometers have been established. Binding energy scale calibration for XPS spectrometers was standardized as ISO 15472. The calibration of kinetic energy scale for AES spectrometers was standardized as ISO 17973 and 17974. The calibrations for the intensity scale are now discussing. The calibrations for the XPS and AES spectrometers were reviewed. The standard for XPS spectrometers specifies the calibration methods to estimate uncertainty with 95% reliability using repeatability and the linearity of binding energy scale and to correct the binding energy scales. This standard also specifies the method to establish the calibration schedule. Moreover, the standards on AES spectrometers specify the calibrations with high energy resolution for the chemical state analysis and the calibration with the medium energy resolution for elemental analysis.