Quantitative analyses by using reference materials and their standardization are reviewed for secondary ion mass spectrometry (SIMS). The accuracy and precision of SIMS trace analysis is evaluated in terms of the three round robin studies. The repeatability deviation of SIMS measurement itself is estimated to be around 3% when a high ion intensity was available. The repeatability deviation of the quantitative value after calibration using a reference material is around 5% for one laboratory. The reproducibility deviation of the SIMS quantitative values among different laboratories is 10% for a high concentration element, and around 20% for a lower concentration one. However, other factors such as distortion of the extraction field of secondary ions affect the reproducibility, causing a larger deviation for some ion species.