We studied the atomic structure of InSb(001)-c(8×2) surface using high-resolution transmission electron microscopy in the profile-imaging geometry (HR-profile TEM). A structure model was proposed, in which (i) In dimers are located in the third layer and (ii) In atoms with a reduced site occupancy exist in both the first and second layers. Most of features in HR-profile TEM images were well reproduced by the multi-slice simulations based on the present structure model. Also, Auger electron spectroscopy measurements provided satisfactory surface composition for the InSb(001)-c(8×2) surface.
