We applied scanning tunneling microscopy (STM) and low-energy electron diffraction (LEED) to analyze the initial process of graphitization at 6H-SiC(000-1) surfaces. There appeared a (4×4) periodicity in the LEED pattern of the 6H-SiC(000-1) surface annealed at 1050oC. In the STM image, many protrusions with (4×4) periodicity were observed on the graphite formed on the 6H-SiC(000-1) surface.
