特集：マイクロ・ナノ加工技術の最前線
エアロゾルデポジション法とその応用
2004 年 25 巻 10 号 p. 635-641
詳細
2004 年 25 巻 10 号 p. 635-641
Aerosol deposition (AD) is a novel ceramics coating method based on shock-consolidation of fine powder jet follow at room temperature. In this paper, overview of particular features and application to MEMS devices, RF-components, and optical devices on AD were reported.
