2005 年 26 巻 8 号 p. 460-467
An upright configuration SPELEEM (Spectroscopic PhotoEmission and Low Energy Electron Microscope) has been introduced in SPring-8 in the framework of the nanotechnology support project of Ministry of Education, Culture, Sport, Science and Technology (MEXT), Japan. SPELEEM combines microscopy, spectroscopy and diffraction in one system, which allows a comprehensive characterization of the specimen. The combination of SPELEEM and polarized (circularly or linearly) soft X-rays in SPring-8 is expected to realize the highest performance. The characteristics of SPELEEM and typical results, for example nano-XANES (X-ray absorption near edge structure) of Fe oxide on Fe(100) surface, nano-XPS (X-ray photoemission spectroscopy) of indium (In) on Si(111) and antiferro-magnetic domain structure images of NiO(001) single crystal, are reported.