A new method for silanol analysis by derivatization XPS has been presented. The feature of this method is to use tridecafluoro-1,1,2,2-tetrahydrooctyl dimethylchlorosilane (FOCS) for the derivatization reagent. We have applied this method to the surface analysis of silicon containing diamond like carbon (DLC-Si) coatings and found that silanol groups on the surface of DLC-Si coatings reduce the friction coefficient.
