For large area coating of architectural glass work with excellent quality and performance of self-cleaning, the sputtering method is suitable for the thickness uniformity and the appearance. Usage of a seed layer is illustrated to form the anatase structure of TiO₂. The coating shows the good photo-activity and the excellent self-cleaning performance. This seed layer effectively makes the incomparable lattice matching to the anatase TiO₂. Finally, it was found that the double side sputtering with high performance LowE coating is real process when the seed layer is utilized.