The ISO/TC202 was established in 1991 as the first Chinese ISO/TC (Technical Committee) secretariat. Its scope is the standardization in the field of microbeam analysis (measurement, parameters, methods and reference materials) that uses electrons as an incident beam with electrons and photons as the detection signal. The purpose is to analyze the compositional and structural characteristics of solid materials. The volume of analysis will generally involve a depth of up to 10 micrometers and a surface area less than 100 square micrometers. In the future, consideration of other techniques may be included as these techniques mature and further standards are required. At present the instruments which are included in this scope are EPMA (Electron Probe Microanalysis), AEM (Analytical Electron Microscopy), SEM (Scanning Electron Microscopy), EDS (Energy Dispersive Spectrometry) and EBSD (Electron Backscattered Diffraction). The international standards that have been established since theTC202 was founded in 1991 and also those that are still under establishment are shown here.