表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
特集:化合物半導体ナノ作製技術の新展開
GaAs,InAsナノウィスカーの成長と物性
比留間 健之原口 恵一矢沢 正光勝山 俊夫
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2008 年 29 巻 12 号 p. 736-739

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Growth characteristics of GaAs and InAs nanowhiskers formed by using the vapor-liquid-solid growth method during metal organic vapor-phase epitaxy are reviewed. The nanowhiskers grown along the <111>B crystallographic orientation were as thin as 10-500 nanometers and up to 5 micrometers long. The width of grown nanowhiskers was dependent on the growth temperature and the thickness of Au deposit used as a growth catalyst. The minimum width of the nanowhiskers was estimated to be about several nanometers, which is a growth limit predicted by the Gibbs-Thomson effect. Current-voltage characteristics of selectively grown Si-doped GaAs nanowhiskers were measured. A step-like current change as large as 0.5 microamperes was reproducibly observed on the background current-voltage curve of between 0 and 1.0 microamperes, suggesting that carrier trap levels on the whisker surface might be involved in the change.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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