Shave-off depth profiling achieves depth information by reconstructing accurate elemental distributions even for a roughed surface and a hetero interface. In this paper, we will demonstrate two examples using shave-off depth profiling. One example is a memory chip on semiconductor, which is consisted of thousands of via-holes on the surface. Shave-off depth profiling reconstructed the sample as a manufacturing process. Useful yield on shave-off depth profiling was discussed on the same sample. The other example is focused on hetero interface, which might cause failure on circuit board. Shave-off depth profiling visualized the electro-chemical migration process ; diffusion from Cu anode to resign. We concluded that the shave-off depth profiling is powerful to samples with roughed surface and hetero interface.