表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
記念総説
電子分光法を用いた表面分析法の信頼性の向上
吉原 一紘
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ジャーナル フリー

2010 年 31 巻 1 号 p. 6-12

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About 40 years have passed, since commercial surface analyses instruments for electron spectroscopy appeared, and these instruments are now widely used in production lines as well as research fields. Since 1982, many international research projects have been executed under VAMAS umbrella, and a lot of information has been obtained to improve the reliability of surface analyses. In 1991, ISO TC201 was established to achieve the standardization of surface chemical analyses, and 38 ISO standards have been published. In this paper, the research results on the improvement of the reliability of electron spectroscopy are introduced, and the ISO standards directly relating to the electron spectroscopy are explained.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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