表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
研究紹介
六方晶窒化ホウ素のエピタキシャル成長とその紫外発光特性
小林 康之蔡 俊瓏赤坂 哲也
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2010 年 31 巻 2 号 p. 99-105

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抄録

Hexagonal BN (h-BN) is graphite-like sp2-bonded crystal phase, which is the most stable among crystalline BN phases, and has a potential for optical device applications in the deep ultraviolet spectral region. Crystalline phase of BN film grown on a foreign substrate is turbostratic BN (t-BN) or mixed phase with t-BN, h-BN and cubic BN due to the large lattice mismatch and its various crystalline BN phases. Therefore, control of the crystalline phase in the BN film is challenging for single-phase BN growth. Here, we demonstrate that single-phase h-BN epitaxial films can be grown on nearly lattice-matched substrates by optimizing growth conditions during metalorganic vapor phase epitaxy and molecular beam epitaxy (MBE). We also investigate the ultraviolet luminescence properties of near band-gap emission in the h-BN epitaxial films grown by MBE.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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