論文
希釈イオン液体による絶縁性試料の高倍率におけるSEM像観察およびEDXによる組成分析
2011 年 32 巻 10 号 p. 659-663
詳細
2011 年 32 巻 10 号 p. 659-663
A few micro liters of 10-2 wt.% ionic liquid diluted by ethanol or acetone dropped onto insulating samples made it possible to observe scanning electron microscope (SEM) image at 5000 magnification, which is as clear as Pt-Pd sputtering. SEM-EDX analysis of sulfur is possible when using sulfur-free ionic liquid diluted down to 10-2 wt.%. Quantitative analysis using the ZAF method is also possible for insulating samples.
