表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
論文
熱ナノインプリント法における樹脂表面のガラス転移温度とナノパターン形成性との関係
青山 滋高橋 弘造
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2012 年 33 巻 2 号 p. 100-105

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Thermal nano-imprinting is a useful method for making nano-patterns onto various polymer surfaces. The clarification of the relationship between polymer properties and moldability of nano-patterns is very important in order to form the nano-patterns with very high precision and without defects. So far, reports on the moldability of nano-patterns have discussed in terms of bulk polymer properties. The objective of this research is to characterize the relationship between a surface glass transition temperature and moldability of nano-patterns by thermal nano-imprinting. The surface glass transition temperature of a polymer in nano-patterns was estimated by a model measuring method. By the scanning probe microscope measurement, it was supposed that the glass transition temperature in a nano-pattern is lower than that of a bulk polymer and declines as the pattern size becomes fine. As a result of nano-imprinting, to keep a surface glass transition temperature higher than a mold releasing temperature was required in order to make nano-patterns with very high precision and without defects.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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