A vibration-aided micro-forging was performed on various metallic foils under different conditions to obtain a reliable surface that has low surface roughness values. When micro-forged it with vibration under proper experimental conditions, the surface roughness value was found to be decreased by more than 70%. However, no so significant improvement on the surface roughness can be obtained without vibration. Based on this experimental study, the surface asperities variation was approximately proportional to the forming energy W, which increases the ability of dislocations to overcome the forming resistance in micro-forging.